Laser processing apparatus and laser processing method

ABSTRACT

A laser processing apparatus is provided including: a laser generator generating a light beam; a branching means for branching out the light beam to a plurality of beams arranged at equal intervals; a shifting means for shifting the plurality of beams at a pitch equal to a multiple of natural number of the arranged intervals relatively over a target; and a control means for controlling the intensity of the beam synchronously with the shifting pitch of the plurality of beams.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a divisional patent application of U.S. Ser. No.10/984,674 filed Nov. 9, 2004, claiming priority to Japanese PatentApplication No. 2003-384186 filed Nov. 13, 2003, all of which areincorporated by reference.

BACKGROUND

1. Field of the Invention

The present invention relates to laser processing technology, andparticularly to laser processing technology which excels in massproduction.

2. Related Art

As processing techniques of removing a film formed on a substrate orperforating a substrate, there is employed a method of applying aplurality of beams on one point with a target in a stationary condition.However, in such a method, since processing is performed to each point,in a case where there are a great number of points to be processed,shifting and stopping (acceleration and reduction of speed) of thetarget is repeated per point to be processed, an enormous period of timeis required for processing.

On the other hand, there is a method whereby a light beam emitted from alaser generator is branched out to a plurality of light beams to shortenthe processing time. Yet, there is a limit to the number of pointsbranched toward due to an output limit of the laser generator. Hence, inthe case of a substantial number of points to be processed, noappreciable effect is obtained. There is also a case of scattering dueto branching.

To solve such output problem, Japanese Unexamined Patent Publication No.2002-263876 employs two units of the laser generator in an overlappingmanner for increasing laser intensity. Nevertheless, when using aplurality of laser generators in this manner, it is difficult to carryout adjustments to correct slippage of optical axes of the lasergenerators.

Further, it is conceivable to use a plurality of units of lasergenerators, without branching the light beam, such that one beam may begenerated per laser generator. In this case, it is difficult to carryout adjustments and maintenance of pitch accuracy among the beams.

Still further, use of a plurality of laser generators increasesequipment cost, thus leading to a rise in the processing cost of aproduct.

On the other hand, in the case of using the photolithographic processthrough mask projection, the time for processing is long and cost ishigh, hence, it is not suitable for processing large-sized substrates.

Accordingly, it is an object of the present invention to providelaser-processing technology which excels in mass production.

SUMMARY

A first embodiment of the present invention is a laser processingapparatus that comprises: a laser generator generating a light beam; abranching means for branching the light beam into a plurality of beamsarranged at equal intervals; a shifting means for relatively shiftingthe plurality of beams on a target at a pitch equal to a multiple of anatural number of the arranged intervals; and a control means forcontrolling the intensity of the beam synchronously with a shiftingpitch of the plurality of beams.

According to such configuration, since irradiation is carried out in anoverlapping manner while shifting the plurality of beams, it is possibleto efficiently form a group of many spot traces (holes) of a desireddepth, without being restricted by an output limit of the lasergenerator, by adjusting the number of shots of a beam as appropriate atthe same spot.

Further, when performing pinhole processing on a thin film formed on thesubstrate, there is a case of achieving the object through one-timeirradiation. However, if a minute foreign object should be present atthe processing position, it may sometimes be difficult to perforate withcertainty by one-time irradiation only. Even in such a case, the use ofthe method according to the present invention enables the foreign objectto be removed by means of the first irradiation by laser. Since thesecond irradiation makes it possible to perforate with certainty, it ispossible to avoid inferior processing.

Control in the above-mentioned control means includes a control of anon/off operation of a beam.

A second embodiment of the present invention is a laser processingmethod, which comprises: a first irradiating step of forming a firstgroup of spot traces by applying a plurality of beams, which aregenerated by branching out the light beam generated from the lasergenerator and arranged at equal intervals, simultaneously to the target;and a second irradiating step of forming a second group of spot tracesby relatively shifting the plurality of beams at a pitch equal to amultiple of a natural number of the arranged intervals on the targetsuch that the first group of spot traces overlaps part of the spots.

Accordingly, it is possible to efficiently form a group of many spottraces (holes) of a desired depth, without being restricted by theoutput limit of the laser generator, by adjusting the number of shots ofa beam as appropriate at the same spot.

It is preferable to repeat the above-mentioned second irradiating step aplurality of times by considering the above-mentioned second group ofspot traces as the above-mentioned first group of spot traces. In thisway, it is possible to form a consecutive multiplicity of groups of spottraces.

It is preferable for a number of shots S applied to one point to be anumber obtained by the following equation (1):S=M·(P/L)  (1)

where P is a pitch between the plurality of beams, M is a number ofbranches of the beam, and L is an amount of shifts (in the aboveformula, S is a natural number, and L is a multiple of a natural numberof P). In this way, it is made possible to easily select conditions forobtaining the desired number of shots.

The relative shift of the above-mentioned plurality of beams may beperformed intermittently. It is possible to enhance the positionalaccuracy at the time of applying a beam by stopping when applying a beamand shifting after irradiation.

Relative shifting between the plurality of beams and the target may beat consecutively variable speed, or motion at fixed speed. By makingconsecutive shifts without stopping the shift, high speed processing canbe made. Further, by shifting at a variable speed, it becomes possibleto enhance irradiation accuracy at the time of applying a beam, andfurther, when a complete stop is made, there is a possibility ofpositional slippage due to inertia. However, with the consecutiveshifts, there is no such positional slippage. Still further, in theconventional method of using a plurality of laser generators, it isdifficult to adjust and maintain a pitch accuracy among the beams inthis case, so that irradiation while making consecutive shifts wasdifficult. However, according to the present invention, since one lasergenerator is used, it is possible to irradiate while making consecutiveshifts.

It is preferable to arrange the above-mentioned plurality of beams in amatrix manner. Since a great number of spot traces may be formed all atonce according to this method, further efficiency and high speedprocessing of numerous holes may be made.

It is preferable for the above-mentioned plurality of beams to scan backand forth on a scanning line that has once been scanned. According tothis, processing with certainty becomes possible, thus making itpossible to supply processed products of stable quality.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram explaining a laser processing apparatus according toan embodiment of the present invention.

FIGS. 2A-C are diagrams showing a relationship between an amount ofshifts L when a light beam is branched out to two beams and a number ofshots S.

FIGS. 3A-C are diagrams showing a relationship between the amount ofshifts L when the light beam is branched out to four beams and thenumber of shots S.

FIGS. 4D-E are diagrams showing a relationship between the amount ofshifts L when the light beam is branched out to four beams and thenumber of shots S.

FIGS. 5A-C are diagrams explaining specifically an irradiation processwhen the light beam is branched out to four beams.

FIGS. 6D-F are diagrams explaining specifically the irradiation processwhen the light beam is branched out to four beams. and

FIG. 7 shows an example when the beams are branched out in a matrixpattern.

DETAILED DESCRIPTION

An embodiment of the present invention will be described as follows withreference to the drawings. In an embodiment of the present invention, alight beam generated from one laser generator is branched out to aplurality of beams arranged at equal intervals.

A group of spot traces is formed on a target with these branched beams,and irradiation is performed by shifting the plurality of beams to beapplied subsequently such that the preceding group of spot tracesoverlaps part of the spots. This enables a multiplicity of spot tracesto be efficiently mass produced without being restricted by the outputof the laser generator.

FIG. 1 is a diagram to explain a laser processing apparatus according tothe embodiment of the present invention.

As shown in FIG. 1, the laser processing apparatus 100 of the presentembodiment is configured including a laser generator 10, a diffractiongrating 16, a lens 18, precision positioning tables 30, and a control 40controlling the intensity of a beam. It should be noted that the“branching means” used herein corresponds to the diffraction grating 16and the lens 18, while the “shifting means” used herein corresponds tothe precision positioning tables 30.

Description will be made below by taking, for example, a case ofperforating a metallic plate 20 as a work piece (target).

The laser generator 10 generates a light beam in response to a signalsent from the control 40. The timing of generating the light beam isdetermined by a relationship with a shifting distance of the metallicplate 20 which is a target. This timing will be described in detaillater. As the laser generator 10 to be used herein, that which iscapable of perforating the metallic plate 20, such as a CO₂ laser and aYAG laser, may be cited.

The diffraction grating 16 is what branches out the light beamoscillated from the laser generator 10 to a desired number of beams atequal intervals. A Fourier transform type 2-value phase grating may becited as such diffraction grating 16. Beams 51 branched out by thediffraction grating 16 are condensed by the lens 18 onto the metallicplate 20, forming spot traces aligned at equal intervals on the metallicplate 20.

The precision positioning tables 30 are for loading and shifting themetallic plate 20. Specifically, one-axis tables are configured suchthat one table intersects the other mutually at 90 degrees to be layeredover in two stages so as to enable a shift to be made in the xydirection. Each table is driven by a feed screw mechanism through aservo motor 21.

The control 40 transmits a drive signal to the precision positioningtables 30 to perform a pre-defined drive. The drive mode of theprecision positioning tables 30 is not particularly specified and may becontrolled so as to shift intermittently or to shift at a variable speedor a fixed speed. Specifically, the table shift may be suspendedtemporarily at the time of irradiation by the laser so as to restart theshift after the irradiation by laser (intermittent shift). Further, thetable shift speed may be reduced at the time of irradiation by laser andincreased after the irradiation by laser (variable speed shift). Stillfurther, control may be made so as to shift at a fixed speed at alltimes (fixed speed shift).

Furthermore, the control 40 transmits a signal to the laser generator 10to control an oscillation interval of the light beam. The interval ofthe light beam oscillation (interval of oscillation of the light beam)of the laser generator 10 is determined such that the next irradiationis performed when the metallic plate 20 has shifted a pre-determineddistance after the preceding irradiation. This shifting distance (amountof shifts) L is determined to be a multiple of natural number (N) of adistance (branch pitch) P between the branched beams 51, that is, tomeet a relationship of L=N·P.

For example, after the first irradiation, the distance of the shift ofthe metallic plate is read by a linear scale counter or the like, and asignal is transmitted to the laser generator 10 so that a secondirradiation is made upon shifting over a pre-defined distance.Specifically, when an electric signal of 1 pulse is read by a counterprovided at each table in case of the table shifting 1 μm, as thecounter reads 10 pulses (corresponding to a shift distance of 100 μm), 1pulse of a signal is transmitted to the laser generator 10. In thiscase, a laser pulse is emitted per 100 μm and processed.

Next, the operation of the laser processing apparatus 100 will bedescribed.

A light beam 5 oscillated from the laser generator 10 is enlarged by anexpander collimator 12, reflected by a reflector 14, and branched out bythe diffraction grating 16 to a plurality (for example, four) of beams51. Thereafter, through a condensing lens 18, there are formed, forexample, four first spot traces aligned at equal intervals along astraight line on the metallic plate 20 loaded on the precisionpositioning tables 30.

Then, the metallic plate 20 is shifted in a direction (x-axis direction)of forming the spot traces, that is, along the straight line on whichthe group of spot traces is aligned, and subjected to irradiation by thebeams 51 to form a second group of spot traces. The metallic plate 20shifts so that part of the second group of spot traces overlaps thefirst spot traces. Consequently, the depth of a hole finally formed isdetermined by the number of shots S of the beams 51 applied to one spot(one point).

Next, while referring to the drawings, relationships among the number ofshots S, the amount of shifts L from a preceding irradiation position toa succeeding irradiation position, the branch pitch P of the beams 51,and the number of branches M will be described.

In FIG. 2, there is shown a relationship between the amount of shifts Lwhen the light beam is branched out to two and the number of shots S. Itshould be noted that the value of L/P is listed for the amount of shiftsfor the sake of convenience in this drawing.

In FIG. 2A, there is shown a method of calculating the number of shots Sof the beams 51 applied to one spot in case of M=2 and L/P=1. As shownin this figure, the laser irradiation position (forming position of spottraces (holes)) is taken on the transverse axis, while the frequency ofshots is taken on the longitudinal axis. The amount of shifts L and thenumber of branches M are listed in the table. By calculating the totalamount of the frequency of shots, the frequency of shots S per one spotmay be obtained.

In this example, since the number of branches M is two, at thebeginning, a first irradiation is made to positions 1 and 2. Next, afterthe irradiation position is slipped by L/P=1, a second irradiation ismade. When this is repeated, at the n-th irradiation, the irradiationposition slips by L/P=n−1, hence, n and n+1 are to be irradiated.Further, the frequency of shots S at each position obtained from thetable becomes two.

It should be noted that when forming while making the depth ofconsecutive holes fixed, arranged at equal intervals, the frequency ofshots S may be obtained from a formula (I) shown below.

The number of shots S, the amount of shifts L, the branch pitch Pbetween branched beams, and the number of branches M meet a relationshipshown in the following formula (I):S=M−(P/L)  (1).

where S is a natural number and L is a multiple of a natural number (N)of P.

FIG. 2B shows a method of calculating the number of shots S of the beams51 applied to one spot in the case of M=2 and L/P=2. In this case, thefrequency of shots S at each position obtained from the table becomesone.

FIG. 2C shows a method of calculating the number of shots S of the beams51 applied to one spot in the case of M=2 and L/P=3. In this manner, ifa relationship between the amount of shifts L and the number of branchesM is L>M, as shown in the table in this figure, it is impossible tocarry out overlapping irradiation on one spot.

FIGS. 3A to C and FIGS. 4D to E respectively show a relationship withthe number of shots S of the beams 51 applied to one spot in the case ofM=4 and L/P=1 to L/P=5. It should be noted that the value of L/P islisted for the amount of shifts for the sake of convenience in thesedrawings.

As shown in FIG. 3A, if the number of branches M is increased, thenumber of shots S of the beams 51 to be applied to one spot increases.Namely, S=4, in the case of M=4 and L/P=1.

As shown in FIG. 3B and FIG. 4D, in the case of M=4 and L/P=2 or L/P=4,the number of shots S of the beams 51 to be applied to one spotrespectively becomes S=2 and S=1, so that it is possible to form holesof equal intervals respectively at the fixed depth.

Further, as shown in FIG. 3C, in the case of M=4 and L/P=3, S changesperiodically. Therefore, this condition may be used in the case offorming deeply only pre-defined holes at fixed intervals.

As shown in FIG. 4E, in the case of M=4 and L/P=5, because L/P>M, it isimpossible to carry out overlapping irradiation on the same spot.

Next, a process of forming a hole through overlapping irradiation willbe specifically described by taking, for instance, the case of M=4 andL/P=2.

FIG. 5 is a diagram to specifically explain the irradiation process whenthe light beam is branched out to four beams.

FIG. 6A shows a group of spot traces formed when the light beam S0 isbranched out to four (M=4). As shown therein, the distance P betweenspot traces is an equal interval.

As shown in FIG. 5B, by way of the first shot (first irradiation,hereinafter, referred to the same), the group of spot traces is formedat a distance of P between pitches at positions 1 to 4. At this point,white circles placed on the shifting (scan) directional axis in thedrawing show holes formed when one shot of irradiation by the laser ismade.

As shown in FIG. 5C, a second shot of irradiation is made from position3 to position 6 by shifting 2P. This enables irradiation by the laser tobe made in two shots. At this point, black circles placed on theshifting directional axis in the drawing show holes formed when twoshots of irradiation by the laser are made.

As shown in FIG. 6D, a third shot of irradiation is made from position 5to position 8 by shifting 2P from the reference position 3 of the secondshot.

As shown in FIG. 6E, a fourth shot of irradiation is made from position7 to position 10 by shifting 2P from the reference position 5 of thethird shot.

FIG. 6F shows a group of spot traces formed when an n-th shot ofirradiation is made. The n-th shot is made on position 2 n−1 by shifting2P from the reference position 2 n−3 of the (n−1)-th shot.

In this manner, by carrying out irradiation in terms of shifting per 2P,it is possible to efficiently form mutually adjacent holes at equalintervals whose depth are all fixed (two shots of irradiation by thelaser).

In the present embodiment, by using branched beams of a plurality ofbeams produced as the light beam generated by the laser generator wasbranched out, the branched beams are applied in an overlapping mannerwhile shifting at a pre-defined pitch. Consequently, without beingrestricted by the output limit, the number of shots at the same spot ofthe beams is adjusted as appropriate, so that many groups of spot traces(holes) of a desired depth may be efficiently formed.

It should be noted that conditions such as the number of shots S, thenumber of branches M, and the amount of shifts L are not bound by theabove-mentioned examples, and may be selected properly within a range ofsolving the problem of the present invention.

In the present embodiment, a case where beams branch out in a singleline was described, but beams branched out in a matrix pattern may beused.

FIG. 7 illustrates a case where beams branched out in a matrix patternis used. A case is illustrated where the light beam 50 which is branchedout to four branches in the forward direction and further branched outto three branches in the forward direction and the perpendiculardirection (a case of branching 4×3 branches).

In this case, too, by shifting at the same pitch interval (for example,per 2P), it is possible to carry out irradiation for a plurality oftimes on the same spot.

In this manner, by using beams branched out in a matrix pattern, it ispossible to form a huge amount of spot traces in one operation, thusenabling further efficiency and high speed operation of multi-holeprocessing to be achieved.

Further, irradiation of the same spot may be carried out again byscanning back and forth on a scanning line that has once been scanned.Through this operation, it becomes possible to form spot traces withcertainty, thus enabling processed products of stable quality to beprovided.

In the present embodiment, shifting of an irradiation beam relative tothe metallic plate which is subject to irradiation is performed by theprecision positioning tables which load the metallic plate. However, notbound by this, the shifting may be done, for example, by moving anoptical system from the laser generator 10 to the condensing lens 18.Also, it may be done by moving only an optical system from the reflector14 to the condensing lens 18.

While the laser processing method of the present embodiment has beendescribed by taking perforation processing for example, it is notlimited to such processing and processing such pin-hole processing of athin film may be used. When performing pin-hole processing to a thinfilm form on the substrate, one-time irradiation may accomplish theobjective. However, for example, in a case where there are minuteforeign objects at the processing position, it may be difficult forone-time irradiation to accomplish the objective. Even in such a case,according to the method of the present embodiment, it is possible toremove any foreign object by the first laser irradiation and toperforate with certainty by the second irradiation, thereby making itpossible to avoid inferior processing.

Further, the laser processing method of the present embodiment may beapplied to thin film exposure.

The present invention may be suitably used, for example, for devicesthat require the processing of many holes such as manufacturing a microlens array used for rear projection as well as perforating a fluidcourse of a high density inkjet head.

1. A laser processing apparatus, comprising: a laser generatorgenerating a light beam; a branching means for branching out the lightbeam to a plurality of beams arranged at equal intervals; a shiftingmeans for relatively shifting the plurality of beams on a target at apitch equal to a multiple of a natural number of the arranged intervals,wherein the relative shift of the plurality of beams being one of aconsecutively variable speed and a fixed speed, the plurality of beamsbeing applied to a target to one of remove foreign objects from thetarget and form a group of spot traces on the target; and a controlmeans for controlling an intensity of the beam synchronously with theshifting pitch of the plurality of beams.
 2. A laser processing method,comprising: a first irradiating step of one of removing foreign objectsfrom a target by applying a plurality of beams to the target and forminga first group of spot traces by applying the plurality of beamssimultaneously to the target, the plurality of beams being generated bybranching out a light beam generated from a laser generator and arrangedat equal intervals; and a second irradiating step of forming a secondgroup of spot traces by relatively shifting the plurality of beams at apitch equal to a multiple of a natural number of the arranged intervalson the target such that the first group of spot traces overlaps part ofthe spots, performing the relative shift of the plurality of beams byone of moving a positioning table and moving an optical system, therelative shift of the plurality of beams being one of a consecutivelyvariable speed and a fixed speed.
 3. The laser processing methodaccording to claim 2, further comprising: repeating the second step ofirradiation a plurality of times while considering the second group ofspot traces as the first group of spot traces in each repeated secondstep of irradiation.
 4. The laser processing method according to claim2, further comprising: applying a number of shots S to a point, thenumber of shots S being obtained by the following equation (1):S=M·(P/L)  (1) wherein P is a pitch between the plurality of beams, M isa number of branches of the beam, and L is an amount of shifts.
 5. Thelaser processing method according to claim 2, further comprising:intermittently performing a relative shift between the plurality ofbeams and the target.
 6. The laser processing method according to claim10, further comprising: scanning the plurality of beams back and forthon a scanning line that has once been scanned.
 7. The laser processingmethod according to claim 2, wherein: the plurality of beams arearranged in a matrix pattern.
 8. The laser processing method accordingto claim 2, further comprising: scanning the plurality of beams back andforth on a scanning line that has once been scanned.
 9. A laserprocessing apparatus, comprising: a laser generator generating a lightbeam; a brancher branching out the light beam to a plurality of beamsarranged at equal intervals, the plurality of beams being applied to atarget to one of remove foreign objects from a target and form a groupof spot traces on the target; a shifter relatively shifting theplurality of beams on target at a pitch equal to a multiple of a naturalnumber of the arranged intervals, wherein the shifter moves one of apositioning table and an optical system and the relative shift being oneof a consecutively variable speed; and a controller controlling anintensity of the beam synchronously with the shifting pitch of theplurality of beams.
 10. A laser processing apparatus, comprising:generating a light beam with a laser generator; branching out the lightbeam to a plurality of beams arranged at equal intervals; applying thelight beams to a target to one of remove foreign objects from the targetand form a group of spot traces on the target; relatively shifting theplurality of beams on a target at a pitch equal to a multiple of anatural number of the arranged intervals and at one of a consecutivevariable speed and a fixed speed by moving one of a positioning tableand an optical system; and controlling an intensity of the beamsynchronously with the shifting pitch of the plurality of beams.